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(A) study on plasma-enhanced atomic layer deposition of Ta-Si-O thin films = 탄탈륨 실리콘 산화막의 플라즈마 원자층 증착법에 관한 연구link Song, Hyun-Jung; 송현정; et al, 한국과학기술원, 2003 |
Cycle-CVD법을 이용한 tantalum oxide 원자층 단위 증착 및 특성에 관한 연구 = A study on atomic layer deposition and film characteristics of tantalum oxide using cycle-CVDlink 송현정; Song, Hyun-Jung; et al, 한국과학기술원, 1998 |
Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates Song, Hyun-Jung; Lee, Choon-Soo; Kang, Sang-Won, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.4, no.7, pp.F13 - F14, 2001-07 |
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