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Cu 확산방지용 TCP MOCVD Ta(Si)N 박막 증착 및 특성에 관한 연구 = Deposition and characterization of TCP MOCVD Ta(Si)N thin films as diffusion barrier for Culink 박혜련; Park, Hye-Lyun; et al, 한국과학기술원, 2002 |
Diffusion barrier properties of the TiN films prepared by ECR PECVD method. Park, Hye-Lyun; Jang, Seong-Soo; Lee, Won-Jong, Proceedings of the 1998 MRS Spring Symposium, pp.409 - 0, MRS, 1998-04-13 |
금속 알콕사이드로부터 제조한 $Al_2O_3$-15vol% $ZrO_2$세라믹스의 분말특성 및 소결거동에 관한 연구 = Powder characteristics and sintering behavior of $Al_2O_3$-15vol% $ZrO_2$ ceramics prepared from metal alkoxideslink 박혜련; Park, Hye-Lyun; et al, 한국과학기술원, 1988 |
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