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(A) study on the $HfO_2/Al_2O_3$ nanolaminated thin film by plasma-enhanced atomic layer deposition = PEALD 법으로 증착된 $HfO_2/Al_2O_3$ 박막 증착 및 특성에 관한 연구link Cha, Eun-Soo; 차은수; et al, 한국과학기술원, 2005 |
Interface effect on dielectric constant of HfO2/Al 2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition Park, Pan Kwi; Cha, Eun-Soo; Kang, Sang-Won, APPLIED PHYSICS LETTERS, v.90, no.23, pp.232906, 2007-06 |
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