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(A) study on the effect of intrinsic film stress of Mo source/drain electrodes on electrical characteristics of Al doped In-Zn-Sn-O thin film transistors = 몰리브데늄 소스/드레인 전극의 박막 스트레스가 고이동도 인듐-아연-주석 산화물 박막 트랜지스터의 전기적 특성에 미치는 영향에 대한 연구link Bae, Jaehan; Park, Sang-Hee; et al, 한국과학기술원, 2020 |
Effect of High Film Stress of Mo Source and Drain Electrodes on Electrical Characteristics of Al Doped InZnSnO TFTs Bae, Jaehan; Ma, Boo Soo; Jeon, Gukjin; Jeong, Wooseok; Je, Chang Han; Kim, Taek-Soo; Park, Sang-Hee Ko, IEEE ELECTRON DEVICE LETTERS, v.40, no.11, pp.1760 - 1763, 2019-11 |
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