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Electrical properties of PZT thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition Kim, ST; Kim, JW; Jung, SW; Shin, JS; Ahn, SungTae; Lee, Won-Jong, MATERIALS CHEMISTRY AND PHYSICS, v.45, no.2, pp.155 - 158, 1996-08 |
MICROSTRUCTURE AND ELECTRICAL-PROPERTIES OF TANTALUM OXIDE THIN-FILM PREPARED BY ELECTRON-CYCLOTRON-RESONANCE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION KIM, I; AHN, SD; CHO, BW; Ahn, SungTae; Lee, JeongYong; CHUN, JS; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.33, no.12A, pp.6691 - 6698, 1994-12 |
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