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Formation of TiO2 thin films using NH3 as catalyst by metalorganic chemical vapor deposition Jung, Sung-Hoon; Kang, Sang-Won, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1, v.40, no.5A, pp.3147 - 3152, 2001-05 |
Titanium isopropoxide와 ammonia를 이용하는 촉매화학기상증착법에 의한 $TiO_2$ 박막 형성에 관한 연구 = A study on the formation of $TiO_2$ thin films using titanium isopropoxide and ammonia by catalytic CVDlink 정승훈; Jung, Seung-Hoon; et al, 한국과학기술원, 2001 |
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