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(A) study on the fabrication and characteristics of ruthenium nanocrystal formed by atomic layer deposition = 원자층 증착법을 이용한 루테늄 나노크리스탈의 증착과 전기적 특성에 관한 연구link Oh, Heung-Ryong; 오흥룡; et al, 한국과학기술원, 2008 |
Electromigration Reliability of Barrierless Ruthenium and Molybdenum for Sub-10 nm Interconnection Kim, Jungkyun; Rhee, Hakseung; Son, Myeong Won; Park, Juseong; Kim, Gwangmin; Song, Hanchan; Kim, Geunwoo; et al, ACS APPLIED ELECTRONIC MATERIALS, v.5, no.5, pp.2447 - 2453, 2023-04 |
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