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Effects of gas ring position and mesh introduction on film quality and thickness uniformity Hong, Daniel Seungbum; Kim, E; Jiang, ZT; Bae, Byeong-Soo; No, Kwangsoo; Lim, SC; Woo, S; et al, MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, v.45, no.1-3, pp.98 - 101, 1997-03 |
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