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Design and fabrication of scanning mirror for laser display Lee, JH; Ko, YC; Kong, DH; Kim, JM; Lee, KB; Jeon, DukYoung, SENSORS AND ACTUATORS A-PHYSICAL, v.96, no.2-3, pp.223 - 230, 2002-02 |
SO1-based fabrication processes of the scanning mirror having vertical comb fingers Lee, JH; Ko, YC; Jeong, HM; Choi, BS; Kim, JM; Jeon, DukYoung, SENSORS AND ACTUATORS A-PHYSICAL, v.102, no.1-2, pp.11 - 18, 2002-12 |
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