Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject ferroeletricity▼aZirconium Oxide▼aRuthenium▼aCMOS processing compatible▼aAtomic layer deposition▼aMetal-ferroelectric-metal capacitor▼aPlasma▼aWake up effect▼aFatigue▼aMonolithic processing
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| Study on ferroelectric mechanism of atomic layer deposited ZrO2 film = 원자층증착법으로 증착된 ZrO2 박막의 강유전성 메커니즘 연구link Ko, Myeongchan; 고명찬; et al, 한국과학기술원, 2023 |
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