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(A) study on $SrTiO_3$ thin films deposited by plasma-enhanced atomic layer deposition for DRAM capacitor dielectric = PEALD법으로 증착된 DRAM capacitor 유전체용 $SrTiO_3$ 박막의 특성에 관한 연구link Ahn, Ji-Hoon; 안지훈; et al, 한국과학기술원, 2009 |
Microwave dielectric properties of ferroelectric BaTiO3 thin film Cho, YW; Hyun, TS; Choi, Si-Kyung, JOURNAL OF ELECTROCERAMICS, v.13, no.1-3, pp.251 - 255, 2004-07 |
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