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Room-temperature growth of Cu thin films by nozzle-type partially ionized beam deposition with various acceleration voltages Koh, SK; Yoon, YS; Kim, KH; Jung, HJ; Lee, JeongYong, THIN SOLID FILMS, v.278, no.1-2, pp.45 - 48, 1996-05 |
Three-dimensional deposition topography simulation based on new combinations of flux distribution and surface representation algorithms Kwon, Ui-Hui; Lee, Won-Jong, THIN SOLID FILMS, v.445, no.1, pp.80 - 89, 2003-11 |
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