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ECR-PEMOCVD법을 이용한 $SrTiO_3$박막과 $(BaSr)TiO_3$ 박막의 제조 및 특성분석 = Fabrication and characterization of $SrTiO_3$ and $BaSrTiO_3$ thin films using ECR-PEMOCVDlink 이준성; Lee, Joon-Sung; et al, 한국과학기술원, 1998 |
Effects of NH3 carrier gas on the deposition and electrical characteristics of (SrTi)O-3 films grown by ECR plasma assisted MOCVD Lee, Joon Sung; Song, Han Wook; Jun, Byung Hyuk; Yu, Byoung Gon; No, Kwangsoo, INTEGRATED FERROELECTRICS, v.20, no.1-4, pp.173 - 189, 1998-01 |
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