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RF 마그네트론 스퍼터링법에 의해 증착된 In-doped $Ge_2Sb_2Te_5$ 박막의 미세구조 분석 = Microstructural Analysis of In-doped $Ge_2Sb_2Te_5$ Thin Films Deposited by RF Magnetron Sputteringlink

김용인; Kim, Yong-In; et al, 한국과학기술원, 2008

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