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(A) study on the active and gate insulator processed by plasma-enhanced atomic layer deposition in oxide thin-film transistors for the High resolution display = 고해상도 디스플레이용 산화물 박막트랜지스터를 위한 플라즈마 원자층 증착법의 활성층과 절연층에 대한 연구link Ko, Jong Beom; 고종범; et al, 한국과학기술원, 2016 |
Inserting Interfacial Layer for Atomic-Scaled Hydrogen Control to Enhance Electrical Properties of InZnO TFTs Cho, Seong-In; Woo, Namgyu; Jeong, Hyun-Jun; Park, Sang-Hee Ko, IEEE ELECTRON DEVICE LETTERS, v.44, no.4, pp.650 - 653, 2023-04 |
Remarkably stable high mobility self-aligned oxide TFT by investigating the effect of oxygen plasma time during PEALD of SiO2 gate insulator Cho, Seong-In; Ko, Jong Beom; Lee, Seung Hee; Kim, Junsung; Park, Sang-Hee Ko, JOURNAL OF ALLOYS AND COMPOUNDS, v.893, 2022-02 |
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