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Effect of water absorption on the residual stress in fluorinated silicon-oxide thin films fabricated by electron-cyclotron-resonance plasma-enhanced chemical-vapor deposition Kim, SP; Choi, Si-Kyung; Park, Y; Chung, I, APPLIED PHYSICS LETTERS, v.79, no.2, pp.185 - 187, 2001-07 |
Investigation of nanoporous platinum thin films fabricated by reactive sputtering: Application as micro-SOFC electrode Jung, Woo Chul; Kim, Jae Jin; Tuller, Harry L, JOURNAL OF POWER SOURCES, v.275, pp.860 - 865, 2015-02 |
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