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Analysis and modeling of residual stress in diamond thin film deposited by the hot-filament chemical vapor deposition process Cha, SI; Hong, Soon-Hyung, JOURNAL OF MATERIALS RESEARCH, v.16, no.7, pp.1953 - 1959, 2001-07 |
Intrinsic stress and its relaxation in diamond film deposited by hot filament chemical vapor deposition Choi, Si-Kyung; Jung, DY; Choi, HM, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.14, no.1, pp.165 - 169, 1996-01 |
Variations of morphology and electrical property of diamond with doping using diborane in a methane-hydrogen gas mixture Lee, BJ; Ahn, Byung Tae; Baik, YJ, DIAMOND AND RELATED MATERIALS, v.8, no.2-5, pp.251 - 256, 1999-03 |
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