DSpace at KOASAS
Browsing DSpace

Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject 플로리네이티드 실리콘 나이트라이드 박막

A to Z

All 0-9

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

or enter first few letters:

Showing results 1 to 1 of 1

1
극자외선 리소그래피 하부 무반사층용 fluorinated silicon nitride 박막의 제조 및 특성분석 = Fabrication and characterization of fluorinated silicon nitride thin film for the bottom antireflective layer in deep ultraviolet lithographylink

전병혁; Jun, Byung-Hyuk; et al, 한국과학기술원, 1998

Discover

rss_1.0 rss_2.0 atom_1.0