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Simulation study and fabrication of high transmittance attenuated phase shifting mask Kim, Eunah; No, Kwangsoo; Hong, Daniel Seungbum; Moon, Seong-Yong; Kim, Yong-Hoon; Yoon, Hee-Sun, SPIE Proceedings, v.3873, 1999-12 |
Simulation study and fabrication of high transmittance attenuated phase shifting mask Kim, Eun Ah; Hong, Seung Bum; Moon, Seong-Yong; Kim, Yong-Hoon; Yoon, Hee-Sun; No, Kwangsoo, 19th Annual BACUS Symposium on Photomask Technology, SPIE, 1999-09-15 |
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