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SURFACE-ROUGHNESS AND DEFECT MORPHOLOGY IN ELECTRON-CYCLOTRON-RESONANCE HYDROGEN PLASMA CLEANED (100)SILICON AT LOW-TEMPERATURES HWANG, KH; YOON, E; WHANG, KW; Lee, JeongYong, APPLIED PHYSICS LETTERS, v.67, no.24, pp.3590 - 3592, 1995-12 |
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