Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Author Woo, Sang Gyun
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| Investigation on Applicability of Chromium Based Materials to Attenuated Phase shift Mask for DUV Exposure Hong, Seung Bum; Kim, Eun Ah; Jiang, Zhong Tao; Bae, Byeong-Soo; No, Kwangsoo; Shin, Woo Suck; Lim, Sung Chul; et al, PROCEEDINGS OF SPIE, v.2793, no.I34, pp.134 - 137, 1996-04 |
| Study on Stability of CrFx Flms for Phase Shifting Mask Kim, Eun Ah; Hong, Seung Bum; Jiang, Zhong Tao; No, Kwangsoo; Lim, Sung Chul; Woo, Sang Gyun; Koh, Young Bum, PROCEEDING OF SPIE, 1997 |
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