Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Author Tian, H
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| Composition and electrical properties of metallic Ru thin films deposited using Ru(C6H6)(C6H8) precursor Choi, J; Choi, Y; Hong, J; Tian, H; Roh, JS; Kim, Y; Chung, TM; et al, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.41, pp.6852 - 6856, 2002-11 |
| High transmittance attenuated phase shifting mask of chromium aluminum oxynitride Choi, E; Kim, E; Kim, H; Kim, Y; Tian, H; No, Kwangsoo, PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING , v.4562 II, no.0, pp.1141 - 1150, 2001 |
| High transmittance attenuated phase shifting mask of chromium aluminum oxynitride Choi, E; Kim, E; Kim, H; Kim, Y; Tian, H; No, Kwangsoo, 21th Annual BACUS Symposium on Photomask Technology, pp.1141 - 1150, 2001-10-03 |
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