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Area-selective atomic layer deposition on 2D monolayer lateral superlattices Park Jeongwon; Kwak Seung Jae; Kang Sumin; Oh Saeyoung; Shin Bongki; Noh Gichang; Kim Tae Soo; et al, NATURE COMMUNICATIONS, v.15, no.1, 2024-03 |
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