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(A) study on the ultra-thin copper film formation by chemical vapor deposition = CVD법을 이용한 ultra-thin 구리 박막 형성에 관한 연구link Kwak, Dong-Kee; 곽동기; et al, 한국과학기술원, 2007 |
Metalorganic chemical vapor deposition of copper on ruthenium thin film Kwak, Dong-Kee; Lee, Hyun-Bae; Han, Jae-Won; Kang, Sang-Won, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.9, no.10, pp.C171 - C173, 2006 |
Phase control of iridium and iridium oxide thin films in atomic layer deposition Kim, Sung-Wook; Kwon, Se-Hun; Kwak, Dong-Kee; Kang, Sang-Won, JOURNAL OF APPLIED PHYSICS, v.103, no.2, 2008-01 |
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