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Dependence of the properties of (SrxTi1-x)O-3 thin films deposited by plasma-enhanced metal-organic chemical vapor deposition on electron cyclotron resonance plasma Lee, JS; Song, HW; Jun, BH; Kwack, DH; Yu, BG; Jiang, ZT; No, Kwangsoo, THIN SOLID FILMS, v.301, no.1-2, pp.154 - 161, 1997-06 |
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