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Showing results 1 to 9 of 9

1
(A) study on $SrTiO_3$ thin films deposited by plasma-enhanced atomic layer deposition for DRAM capacitor dielectric = PEALD법으로 증착된 DRAM capacitor 유전체용 $SrTiO_3$ 박막의 특성에 관한 연구link

Ahn, Ji-Hoon; 안지훈; et al, 한국과학기술원, 2009

2
Applicability of step-coverage Modeling to TiO2 thin films in atomic layer deposition

Kim, Ja-Yong; Kim, Jin-Hyock; Ahn, Ji-Hoon; Park, Pan-Kwi; Kang, Sang-Won, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.154, no.12, pp.H1008 - H1013, 2007

3
Effect of crystallinity and nonstoichiometric region on dielectric properties of SrTiO3 films formed on Ru

Kim, Ja-Yong; Ahn, Ji-Hoon; Kang, Sang-Won; Kim, Jin-Hyock; Roh, Jae-Sung, APPLIED PHYSICS LETTERS, v.91, no.9, 2007-08

4
Effect of Sr-ruthenate seed layer on dielectric properties of SrTiO3 thin films prepared by plasma-enhanced atomic layer deposition

Ahn, Ji-Hoon; Kang, Sang-Won; Kim, Ja-Yong; Kim, Jin-Hyock; Roh, Jae-Sung, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.155, no.10, pp.G185 - G188, 2008-08

5
Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition

Ahn, Ji-Hoon; Kim, Ja-Yong; Kim, Jin-Hyock; Roh, Jae-Sung; Kang, Sang-Won, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.12, no.2, pp.G5 - G8, 2009

6
Increment of dielectric properties of SrTiO3 thin films by SrO interlayer on Ru bottom electrodes

Ahn, Ji-Hoon; Kim, Ja-Yong; Kang, Sang-Won, APPLIED PHYSICS LETTERS, v.91, no.6, 2007-08

7
Step coverage modeling of thin films in atomic layer deposition

Kim, Ja-Yong; Ahn, Ji-Hoon; Kang, Sang-Won; Kim, Jin-Hyock, JOURNAL OF APPLIED PHYSICS, v.101, no.7, 2007-04

8
Theoretical Simulation of Surface Evolution Using the Random Deposition and Surface Relaxation for Metal Oxide Film in Atomic Layer Deposition

Ahn, Ji-Hoon; Kwon, Se-Hun; Kim, Jin-Hyock; Kim, Ja-Yong; Kang, Sang-Won, JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, v.26, no.4, pp.371 - 374, 2010-04

9
Thermal stability of RuO2 thin films prepared by modified atomic layer deposition

Kim, Jin-Hyock; Ahn, Ji-Hoon; Kang, Sang-Won; Roh, Jae-Sung; Kwon, Se-Hun; Kim, Ja-Yong, CURRENT APPLIED PHYSICS, v.12, pp.S160 - S163, 2012-09

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