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ECR 플라즈마 화학증착법에 의해 제조된 PZT 박막의 미세구조에 관한 연구 = The study of the microstructure of the PZT thin film deposited by ECR PECVDlink 정수옥; Chung, Su-Ock; et al, 한국과학기술원, 1995 |
ECR-PECVD PZT 박막의 FRAM 소자로의 응용에 관한 연구 = The study on the applicaions to FRAM with PZT thin film fabricated by ECR-PECVDlink 정수옥; Chung, Su-Ock; 이원종; 천성순; et al, 한국과학기술원, 2000 |
Fatigue characteristics of PZT thin films deposited by ECR-PECVD Chung, Su-Ock; Lee, Won-Jong, TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, v.6, no.4, pp.177 - 185, 2005-04 |
Formation of a Lead Zirconate Titanate (PZT)/Pt Interfacial Layer and Structural Changes in the Pt/Ti/SiO 2/Si Substrate during the Deposition of PZT Thin Film by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition Chung, Su-Ock; Kim, Jae Whan; Kim, Geun Hong; Park, Chong Ook; Lee, Won Jong, Japanese Journal of Applied Physics, Vol.36, pp.4386-4391, 1997-07-15 |
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