Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Author Ahn, Ji-Hoon
Showing results 7 to 9 of 9
| Step coverage modeling of thin films in atomic layer deposition Kim, Ja-Yong; Ahn, Ji-Hoon; Kang, Sang-Won; Kim, Jin-Hyock, JOURNAL OF APPLIED PHYSICS, v.101, no.7, 2007-04 |
| Theoretical Simulation of Surface Evolution Using the Random Deposition and Surface Relaxation for Metal Oxide Film in Atomic Layer Deposition Ahn, Ji-Hoon; Kwon, Se-Hun; Kim, Jin-Hyock; Kim, Ja-Yong; Kang, Sang-Won, JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, v.26, no.4, pp.371 - 374, 2010-04 |
| Thermal stability of RuO2 thin films prepared by modified atomic layer deposition Kim, Jin-Hyock; Ahn, Ji-Hoon; Kang, Sang-Won; Roh, Jae-Sung; Kwon, Se-Hun; Kim, Ja-Yong, CURRENT APPLIED PHYSICS, v.12, pp.S160 - S163, 2012-09 |
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