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Influence of N-2 gas pressure on the chemical bonds of amorphous carbon nitride films Roh, Ki-Min; You, Shin-Jae; Choi, Si-Kyung; Kim, Jung-Hyung; Seong, Dae-Jin, JOURNAL OF PHYSICS D-APPLIED PHYSICS, v.42, no.17, pp.175405 - 175411, 2009-09 |
RF magnetron sputtering 증착공정에서 플라즈마 특성과 비정질 $CN_x$ 박막성질의 상관관계에 관한 연구 = A study on the correlation between the plasma and amorphous $CN_x$ film characteristics using RF magnetron sputteringlink 노기민; Roh, Ki-Min; et al, 한국과학기술원, 2011 |
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