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High transmittance attenuated phase shifting mask of chromium aluminum oxynitride Choi, E; Kim, E; Kim, H; Kim, Y; Tian, H; No, Kwangsoo, PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING , v.4562 II, no.0, pp.1141 - 1150, 2001 |
High transmittance attenuated phase shifting mask of chromium aluminum oxynitride Choi, E; Kim, E; Kim, H; Kim, Y; Tian, H; No, Kwangsoo, 21th Annual BACUS Symposium on Photomask Technology, pp.1141 - 1150, 2001-10-03 |
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