Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject PEALD
Showing results 8 to 10 of 10
| Inserting Interfacial Layer for Atomic-Scaled Hydrogen Control to Enhance Electrical Properties of InZnO TFTs Cho, Seong-In; Woo, Namgyu; Jeong, Hyun-Jun; Park, Sang-Hee Ko, IEEE ELECTRON DEVICE LETTERS, v.44, no.4, pp.650 - 653, 2023-04 |
| Plasma-Enhanced Atomic Layer Deposition Processed SiO2 Gate Insulating Layer for High Mobility Top-Gate Structured Oxide Thin-Film Transistors Ko, Jong Beom; Yeom, Hye In; Park, Sang-Hee Ko, IEEE ELECTRON DEVICE LETTERS, v.37, no.1, pp.39 - 42, 2016-01 |
| Remarkably stable high mobility self-aligned oxide TFT by investigating the effect of oxygen plasma time during PEALD of SiO2 gate insulator Cho, Seong-In; Ko, Jong Beom; Lee, Seung Hee; Kim, Junsung; Park, Sang-Hee Ko, JOURNAL OF ALLOYS AND COMPOUNDS, v.893, 2022-02 |
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