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GATE TECHNOLOGY FOR 89 GHZ VERTICAL DOPING ENGINEERED SI METAL-OXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTOR Jeon, DukYoung; TENNANT, DM; KIM, YO; YAN, RH; LEE, KF; EARLY, K, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.10, no.6, pp.2922 - 2926, 1992 |
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