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D.C. 마그네트론 반응성 스퍼터링법으로 증착한 ITO박막에 있어서 고유응력, 배향성 그리고 밀도가 비저항에 미치는 영향 = Effect of density, intrinsic stress and crystallographic orientation on resistivity of ITO thin films deposited by D.C. magnetron reactive sputteringlink 이정일; Lee, Jung-Il; et al, 한국과학기술원, 2000 |
Influence of substrate bias voltage on structure and properties of Cr-Mo-Si-N coatings prepared by a hybrid coating system Hong, Seung Gyun; Kwon, Se-Hun; Kang, Sang-Won; Kim, Kwang Ho, SURFACE & COATINGS TECHNOLOGY, v.203, no.5-7, pp.624 - 627, 2008-12 |
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