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CHARACTERIZATION OF AZ PN114 RESIST FOR SOFT-X-RAY PROJECTION LITHOGRAPHY EARLY, K; TENNANT, DM; Jeon, DukYoung; MULGREW, PP; MACDOWELL, AA; WOOD, OR; KUBIAK, GD; et al, APPLIED OPTICS, v.32, no.34, pp.7044 - 7049, 1993-12 |
GATE TECHNOLOGY FOR 89 GHZ VERTICAL DOPING ENGINEERED SI METAL-OXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTOR Jeon, DukYoung; TENNANT, DM; KIM, YO; YAN, RH; LEE, KF; EARLY, K, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.10, no.6, pp.2922 - 2926, 1992 |
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