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Effect of CxNy Molecular Species on Carbon Nitride Thin Films Deposited by Radio Frequency Magnetron Sputtering Roh, Kimin; Na, Byung-Keun; Choi, Si-Kyung; Kim, Jung-Hyung; Seong, Dae-Jin; Kim, Jung-Won, JAPANESE JOURNAL OF APPLIED PHYSICS, v.47, no.11, pp.8530 - 8533, 2008-11 |
Influence of N-2 gas pressure on the chemical bonds of amorphous carbon nitride films Roh, Ki-Min; You, Shin-Jae; Choi, Si-Kyung; Kim, Jung-Hyung; Seong, Dae-Jin, JOURNAL OF PHYSICS D-APPLIED PHYSICS, v.42, no.17, pp.175405 - 175411, 2009-09 |
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