Showing results 1 to 2 of 2
CHARACTERIZATION OF PBTIO3 THIN-FILMS DEPOSITED ON PT/TI/SIO2/SI SUBSTRATES BY ECR PECVD CHUNG, SW; SHIN, JS; KIM, JW; No, Kwangsoo; Chun , Soung Soon; Lee, Won-Jong, JOURNAL OF MATERIALS RESEARCH, v.10, no.2, pp.447 - 452, 1995-02 |
REACTIVE ION ETCHING MECHANISM OF PLASMA-ENHANCED CHEMICALLY VAPOR-DEPOSITED ALUMINUM-OXIDE FILM IN CF4/O-2 PLASMA KIM, JW; KIM, YC; Lee, Won-Jong, JOURNAL OF APPLIED PHYSICS, v.78, no.3, pp.2045 - 2049, 1995-08 |
Discover