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Surface morphology improvement of metalorganic chemical vapor deposition Al films by layered deposition of Al and ultrathin TiN Ahn, Seong-Deok; Lee, Hyun-Bae; Kang, Sang-Won, JAPANESE JOURNAL OF APPLIED PHYSICS, v.39, no.6A, pp.3349 - 3354, 2000-06 |
분할 화학증착방법으로 증착된 알루미늄 박막의 선택성 및 표면 morphology 개선에 관한 연구 = A study on the improvement of the selectivity and surface morphology of al thin film by cycle chemical vapor depositionlink 안상덕; Ahn, Seong-Deok; 강상원; 천성순; et al, 한국과학기술원, 2000 |
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