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Influence of N-2 gas pressure on the chemical bonds of amorphous carbon nitride films Roh, Ki-Min; You, Shin-Jae; Choi, Si-Kyung; Kim, Jung-Hyung; Seong, Dae-Jin, JOURNAL OF PHYSICS D-APPLIED PHYSICS, v.42, no.17, pp.175405 - 175411, 2009-09 |
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