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Concurrent Optimization of Diffraction Fields from Binary Phase Mask for Three-Dimensional Nanopatterning Lee, Chihun; Chang, Gunho; Kim, Jaekyung; Hyun, Gayea; Bae, Gwangmin; So, Sunae; Yun, Jooyeong; et al, ACS PHOTONICS, v.10, no.4, pp.919 - 927, 2023-04 |
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