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Large-area, scalable fabrication of conical TiN/GST/TiN nanoarray for low-power phase change memory Yoon, Jong-Moon; Jeong, Hu-Young; Hong, Sung-Hoon; Yin, You; Moon, Hyoung-Seok; Jeong, Seong-Jun; Han, Jun-Hee; et al, JOURNAL OF MATERIALS CHEMISTRY, v.22, no.4, pp.1347 - 1351, 2012-01 |
RF 마그네트론 스퍼터링법에 의해 증착된 In-doped $Ge_2Sb_2Te_5$ 박막의 미세구조 분석 = Microstructural Analysis of In-doped $Ge_2Sb_2Te_5$ Thin Films Deposited by RF Magnetron Sputteringlink 김용인; Kim, Yong-In; et al, 한국과학기술원, 2008 |
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