DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lim, TW | ko |
dc.contributor.author | Park, SH | ko |
dc.contributor.author | Yang, Dong-Yol | ko |
dc.contributor.author | Kong, Hong-Jin | ko |
dc.contributor.author | Lee, KS | ko |
dc.date.accessioned | 2010-04-14T07:27:25Z | - |
dc.date.available | 2010-04-14T07:27:25Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-09 | - |
dc.identifier.citation | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.84, pp.379 - 383 | - |
dc.identifier.issn | 0947-8396 | - |
dc.identifier.uri | http://hdl.handle.net/10203/17723 | - |
dc.description.abstract | A nano-surfacing process (NSP) is proposed to directly fabricate three-dimensional (3D) concavo-convex-shaped microstructures such as micro-lens arrays using two-photon polymerization (TPP), a promising technique for fabricating arbitrary 3D highly functional micro-devices. In TPP, commonly utilized methods for fabricating complex 3D microstructures to date are based on a layer-by-layer accumulating technique employing two-dimensional sliced data derived from 3D computer-aided design data. As such, this approach requires much time and effort for precise fabrication. In this work, a novel single-layer exposure method is proposed in order to improve the fabricating efficiency for 3D concavo-convex-shaped microstructures. In the NSP, 3D microstructures are divided into 13 sub-regions horizontally with consideration of the heights. Those sub-regions are then expressed as 13 characteristic colors, after which a multi-voxel matrix (MVM) is composed with the characteristic colors. Voxels with various heights and diameters are generated to construct 3D structures using a MVM scanning method. Some 3D concavo-convex-shaped microstructures were fabricated to estimate the usefulness of the NSP, and the results show that it readily enables the fabrication of single-layered 3D microstructures. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | SPRINGER | - |
dc.subject | NANOSTRUCTURES | - |
dc.subject | LITHOGRAPHY | - |
dc.title | Direct single-layered fabrication of 3D concavo-convex patterns in nano-stereolithography | - |
dc.type | Article | - |
dc.identifier.wosid | 000244090700004 | - |
dc.identifier.scopusid | 2-s2.0-33745895618 | - |
dc.type.rims | ART | - |
dc.citation.volume | 84 | - |
dc.citation.beginningpage | 379 | - |
dc.citation.endingpage | 383 | - |
dc.citation.publicationname | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | - |
dc.identifier.doi | 10.1007/s00339-006-3633-x | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Yang, Dong-Yol | - |
dc.contributor.localauthor | Kong, Hong-Jin | - |
dc.contributor.nonIdAuthor | Lim, TW | - |
dc.contributor.nonIdAuthor | Park, SH | - |
dc.contributor.nonIdAuthor | Lee, KS | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | NANOSTRUCTURES | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.