DC Field | Value | Language |
---|---|---|
dc.contributor.author | Han, Jin-Woo | ko |
dc.contributor.author | Choi, Byung Joon | ko |
dc.contributor.author | Yang, J. Joshua | ko |
dc.contributor.author | Moon, Dong-Il | ko |
dc.contributor.author | Choi, Yang-Kyu | ko |
dc.contributor.author | Williams, R. Stanley | ko |
dc.contributor.author | Meyyappan, M. | ko |
dc.date.accessioned | 2013-08-22T02:28:48Z | - |
dc.date.available | 2013-08-22T02:28:48Z | - |
dc.date.created | 2013-08-21 | - |
dc.date.created | 2013-08-21 | - |
dc.date.issued | 2013-08 | - |
dc.identifier.citation | SEMICONDUCTOR SCIENCE AND TECHNOLOGY, v.28, no.8 | - |
dc.identifier.issn | 0268-1242 | - |
dc.identifier.uri | http://hdl.handle.net/10203/175553 | - |
dc.description.abstract | A replacement of high-k process was implemented on an independent double gate FinFET, following the ordinary gate-first process with minor modifications. The present scheme involves neither exotic materials nor unprecedented processing. After the source/drain process, the sacrificial gate oxide was selectively substituted with amorphous Ta2O5 via conformal plasma enhanced atomic layer deposition. The present gate-first gate-dielectric-last scheme combines the advantages of the process and design simplicity of the gate-first approach and the control of the effective gate workfunction and the interfacial oxide of the gate-dielectric-last approach. Electrical characterization data and cross-sectional images are provided as evidence of the concept. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.title | A replacement of high-k process for CMOS transistor by atomic layer deposition | - |
dc.type | Article | - |
dc.identifier.wosid | 000321701100003 | - |
dc.identifier.scopusid | 2-s2.0-84880285137 | - |
dc.type.rims | ART | - |
dc.citation.volume | 28 | - |
dc.citation.issue | 8 | - |
dc.citation.publicationname | SEMICONDUCTOR SCIENCE AND TECHNOLOGY | - |
dc.identifier.doi | 10.1088/0268-1242/28/8/082003 | - |
dc.contributor.localauthor | Choi, Yang-Kyu | - |
dc.contributor.nonIdAuthor | Han, Jin-Woo | - |
dc.contributor.nonIdAuthor | Choi, Byung Joon | - |
dc.contributor.nonIdAuthor | Yang, J. Joshua | - |
dc.contributor.nonIdAuthor | Moon, Dong-Il | - |
dc.contributor.nonIdAuthor | Williams, R. Stanley | - |
dc.contributor.nonIdAuthor | Meyyappan, M. | - |
dc.type.journalArticle | Article | - |
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