DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yang, Hyun-Ho | ko |
dc.contributor.author | Seo, Min-Ho | ko |
dc.contributor.author | Han, Chang-Hoon | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.date.accessioned | 2013-08-08T06:00:27Z | - |
dc.date.available | 2013-08-08T06:00:27Z | - |
dc.date.created | 2013-06-04 | - |
dc.date.created | 2013-06-04 | - |
dc.date.issued | 2013-05 | - |
dc.identifier.citation | JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.23, no.5 | - |
dc.identifier.issn | 0960-1317 | - |
dc.identifier.uri | http://hdl.handle.net/10203/174736 | - |
dc.description.abstract | We propose and demonstrate a simple and novel method to control the deflection in a suspended microstructure by using a dual current electroplating (DuCE) method. The key concept of this method is to divide the structure into two layers-a bottom layer and a top layer-and then apply respective current densities in electroplating to those two layers while all other conditions are kept the same. In addition to a flat structure, the direction of structure bending is freely controlled by virtue of the DuCE method. Cantilever Ni beams with a length of 400 mu m, which were electroplated by the conventional single current electroplating method, bent downward with a deflection of 3.4 mu m. On the contrary, by the DuCE method, cantilever beams with a length of 400 mu m showed an almost flat structure as desired. (The current densities of the bottom layer, the top layer, and the ratio of the two current densities, are 0.15, 1.24 A dm(-2), and 8.3, respectively.) Consequently, a nickel electroplated spiral structure with a length of 8600 mu m was suspended flat with an end deflection of less than 0.7 mu m (the ratio between the deflection and length is 0.007%). This work therefore represents the unprecedented ultra-long suspended microstructure with submicrometer deflection. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | SINGLE-CRYSTAL SILICON | - |
dc.subject | NICKEL SULFAMATE BATH | - |
dc.subject | THIN-FILMS | - |
dc.subject | RESIDUAL-STRESSES | - |
dc.subject | INTERNAL-STRESS | - |
dc.subject | RF MEMS | - |
dc.subject | COPPER | - |
dc.subject | CANTILEVERS | - |
dc.subject | TECHNOLOGY | - |
dc.subject | BIOSENSORS | - |
dc.title | A new approach to control a deflection of an electroplated microstructure: dual current electroplating methods | - |
dc.type | Article | - |
dc.identifier.wosid | 000317739100016 | - |
dc.identifier.scopusid | 2-s2.0-84878117663 | - |
dc.type.rims | ART | - |
dc.citation.volume | 23 | - |
dc.citation.issue | 5 | - |
dc.citation.publicationname | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | - |
dc.identifier.doi | 10.1088/0960-1317/23/5/055016 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Seo, Min-Ho | - |
dc.contributor.nonIdAuthor | Han, Chang-Hoon | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | SINGLE-CRYSTAL SILICON | - |
dc.subject.keywordPlus | NICKEL SULFAMATE BATH | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | RESIDUAL-STRESSES | - |
dc.subject.keywordPlus | INTERNAL-STRESS | - |
dc.subject.keywordPlus | RF MEMS | - |
dc.subject.keywordPlus | COPPER | - |
dc.subject.keywordPlus | CANTILEVERS | - |
dc.subject.keywordPlus | TECHNOLOGY | - |
dc.subject.keywordPlus | BIOSENSORS | - |
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