DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chan Woo Park, | ko |
dc.contributor.author | Han Young Yu | ko |
dc.contributor.author | Ung Hwan Pi | ko |
dc.contributor.author | Choi, Sung-Yool | ko |
dc.date.accessioned | 2013-06-07T06:42:55Z | - |
dc.date.available | 2013-06-07T06:42:55Z | - |
dc.date.created | 2013-05-13 | - |
dc.date.created | 2013-05-13 | - |
dc.date.created | 2013-05-13 | - |
dc.date.created | 2013-05-13 | - |
dc.date.issued | 2005-04 | - |
dc.identifier.citation | NANOTECHNOLOGY, v.16, no.4, pp.361 - 364 | - |
dc.identifier.issn | 0957-4484 | - |
dc.identifier.uri | http://hdl.handle.net/10203/173748 | - |
dc.description.abstract | We propose a new process of fabricating nano-gap electrode pairs using an atomic-layer-deposited (ALD) thin film as a sacrificial layer. In this technique, we can control the width of a gap precisely by varying the number of deposition cycles of the ALD layer, and produce many identical gaps simultaneously. Using ALD Al2O3 as a sacrificial layer, we have fabricated poly-Si/Au nano-gaps of 10 nm width successfully. This new approach can provide a useful tool for the massive production of integrated molecular device circuits. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.title | Fabrication of poly-Si/Au nano-gaps using atomic-layer-deposited Al2O3 as a sacrificial layer | - |
dc.type | Article | - |
dc.identifier.wosid | 000228949300014 | - |
dc.identifier.scopusid | 2-s2.0-24144496024 | - |
dc.type.rims | ART | - |
dc.citation.volume | 16 | - |
dc.citation.issue | 4 | - |
dc.citation.beginningpage | 361 | - |
dc.citation.endingpage | 364 | - |
dc.citation.publicationname | NANOTECHNOLOGY | - |
dc.identifier.doi | 10.1088/0957-4484/16/4/005 | - |
dc.contributor.localauthor | Choi, Sung-Yool | - |
dc.contributor.nonIdAuthor | Chan Woo Park, | - |
dc.contributor.nonIdAuthor | Han Young Yu | - |
dc.contributor.nonIdAuthor | Ung Hwan Pi | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | METALLIC ELECTRODES | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | SEPARATION | - |
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