Fabrication of Pirani Gauge by Bulk Micromachining for MEMS Vacuum Packaging
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, Hyyn Bin | - |
| dc.contributor.author | Lee, Hee Chul | - |
| dc.date.accessioned | 2013-03-29T12:53:47Z | - |
| dc.date.available | 2013-03-29T12:53:47Z | - |
| dc.date.created | 2012-07-06 | - |
| dc.date.issued | 2011-07 | - |
| dc.identifier.citation | AWAD (Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices), v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/170837 | - |
| dc.language | ENG | - |
| dc.title | Fabrication of Pirani Gauge by Bulk Micromachining for MEMS Vacuum Packaging | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | AWAD (Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices) | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Lee, Hee Chul | - |
| dc.contributor.nonIdAuthor | Shim, Hyyn Bin | - |
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