Control of wafer release in multi cluster tools
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Kyungsu | - |
| dc.contributor.author | Morrison, James R | - |
| dc.date.accessioned | 2013-03-29T07:40:18Z | - |
| dc.date.available | 2013-03-29T07:40:18Z | - |
| dc.date.created | 2012-06-20 | - |
| dc.date.issued | 2010-06 | - |
| dc.identifier.citation | 8th IEEE International Conference on Control and Automation, v., no., pp.1481 - 1487 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/169105 | - |
| dc.language | ENG | - |
| dc.publisher | ICCA | - |
| dc.title | Control of wafer release in multi cluster tools | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 1481 | - |
| dc.citation.endingpage | 1487 | - |
| dc.citation.publicationname | 8th IEEE International Conference on Control and Automation | - |
| dc.identifier.conferencecountry | China | - |
| dc.identifier.conferencecountry | China | - |
| dc.contributor.localauthor | Morrison, James R | - |
| dc.contributor.nonIdAuthor | Park, Kyungsu | - |
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