Cyclic Scheduling of Cluster Tools with Non-Identical Chamber Access Times
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Dae-Kyu | ko |
| dc.contributor.author | Jung, Chihyun | ko |
| dc.contributor.author | Lee, Tae-Eog | ko |
| dc.contributor.author | Jung, Yu-Ju | ko |
| dc.date.accessioned | 2013-03-29T07:13:12Z | - |
| dc.date.available | 2013-03-29T07:13:12Z | - |
| dc.date.created | 2012-06-08 | - |
| dc.date.created | 2012-06-08 | - |
| dc.date.created | 2012-06-08 | - |
| dc.date.issued | 2011-12-14 | - |
| dc.identifier.citation | 2011 Winter Simulation Conference/Modeling and Analysis of Semiconductor Manufacturing, pp.2073 - 2084 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/168948 | - |
| dc.language | English | - |
| dc.publisher | WSC | - |
| dc.title | Cyclic Scheduling of Cluster Tools with Non-Identical Chamber Access Times | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000300520802035 | - |
| dc.identifier.scopusid | 2-s2.0-84863232177 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 2073 | - |
| dc.citation.endingpage | 2084 | - |
| dc.citation.publicationname | 2011 Winter Simulation Conference/Modeling and Analysis of Semiconductor Manufacturing | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Phoenix | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
| dc.contributor.nonIdAuthor | Kim, Dae-Kyu | - |
| dc.contributor.nonIdAuthor | Jung, Chihyun | - |
| dc.contributor.nonIdAuthor | Jung, Yu-Ju | - |
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