DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, Dong-Woo | ko |
dc.contributor.author | Kang, Sung-Hoon | ko |
dc.contributor.author | Kwon, Young-Man | ko |
dc.contributor.author | Kim, Kyong-Woo | ko |
dc.contributor.author | Yoo, Hongki | ko |
dc.contributor.author | Kim, Tac-Hun | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.contributor.author | Rah, Seung-Yu | ko |
dc.contributor.author | Min, Jin-Young | ko |
dc.contributor.author | Yoon, Kwon-Ha | ko |
dc.date.accessioned | 2010-02-10T06:11:13Z | - |
dc.date.available | 2010-02-10T06:11:13Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007-01 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, v.46, no.1, pp.394 - 399 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/16592 | - |
dc.description.abstract | We demonstrate an alignment method for a laboratory-scale soft X-ray microscope, which utilizes a liquid-jet laser-produced plasma source in combination with a tandem ellipsoidal condenser mirror and a diffiractive micro zone plate. Because the intensity of the laser-produced plasma source is relatively low, we developed the tandem ellipsoidal condenser mirror to increase the photon density in the objective plane and to obtain a high-resolution image within a short exposure time. But, aligning the tandem ellipsoidal condenser mirror is a difficult task because it has 5 degrees of freedom (DOF) alignment tolerances and there is a connection among these tolerances. We performed its tolerance analysis and developed a new fully automated alignment algorithm via computer control. As a result, a 12.5-mu m-pitch gold mesh image was measured using 700x magnification and a 5 min exposure and the resultant edge detection resolution was about 70 nm. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | Japan Soc Applied Physics | - |
dc.title | Alignment of laboratory-scale soft X-ray microscope using laser plasma | - |
dc.type | Article | - |
dc.identifier.wosid | 000243858500086 | - |
dc.identifier.scopusid | 2-s2.0-34547565488 | - |
dc.type.rims | ART | - |
dc.citation.volume | 46 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 394 | - |
dc.citation.endingpage | 399 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
dc.identifier.doi | 10.1143/JJAP.46.394 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Yoo, Hongki | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Kang, Dong-Woo | - |
dc.contributor.nonIdAuthor | Kwon, Young-Man | - |
dc.contributor.nonIdAuthor | Kim, Kyong-Woo | - |
dc.contributor.nonIdAuthor | Kim, Tac-Hun | - |
dc.contributor.nonIdAuthor | Rah, Seung-Yu | - |
dc.contributor.nonIdAuthor | Min, Jin-Young | - |
dc.contributor.nonIdAuthor | Yoon, Kwon-Ha | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | soft X-ray microscope | - |
dc.subject.keywordAuthor | laser-produced plasma source | - |
dc.subject.keywordAuthor | X-ray optics | - |
dc.subject.keywordAuthor | grazing incidence reflective mirror | - |
dc.subject.keywordAuthor | tandem ellipsoidal condenser mirror | - |
dc.subject.keywordAuthor | alignment algorithm | - |
dc.subject.keywordAuthor | precision stage | - |
dc.subject.keywordAuthor | nanotechnology | - |
dc.subject.keywordPlus | SPATIAL-RESOLUTION | - |
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