Design of a Cylindrical Flexure Jointed Stewart Platform for Aligning the Condenser in an X-ray Microscope

Abstract

This paper proposes a new type of six-degree-of-freedom fine positioner that can be used to align the condenser in X-ray microscopy precisely. The new concept was based on the requirements for an X-ray microscope. A proposed modeling method was used to obtain an optimal design, which was verified with a finite element analysis. The fine positioner was then constructed and an experiment was used to validate its performance.