A new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage

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Next-generation lithography requires a high precision stage, which is compatible with a high vacuum condition. A magnetic levitation stage with six degrees-of-freedom is considered state-of-the-art technology for a high vacuum condition. The noncontact characteristic of magnetic levitation enables high precision positioning as well as no particle generation. To position the stage against gravity, z-directional electromagnetic levitation mechanisms are widely used. However, if electromagnetic actuators for levitation are used, heat is inevitably generated, which deforms the structures and degrades accuracy of the stage. Thus, a gravity compensator is required. In this paper, we propose a new magnetic bearing using Halbach magnet arrays for a magnetic levitation stage. The novel Halbach magnetic bearing exerts a force four times larger than a conventional magnetic bearing with the same volume. We also discuss the complementary characteristics of the two magnetic bearings. By modifying the height of the center magnet in a Halbach magnetic bearing, a performance compromise between levitating force density and force uniformity is obtained. The Halbach linear active magnetic bearing can be a good solution for magnetic levitation stages because of its large and uniform levitation force.
Publisher
AMER INST PHYSICS
Issue Date
2009
Language
English
Article Type
Article
Keywords

DESIGN

Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.80, no.4

ISSN
0034-6748
DOI
10.1063/1.3116482
URI
http://hdl.handle.net/10203/16587
Appears in Collection
ME-Journal Papers(저널논문)
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